Poly resistor for metal gate integrated circuits

ABSTRACT

An integrated circuit containing a metal gate transistor and a thin polysilicon resistor may be formed by forming a first layer of polysilicon and removed it in an area for the thin polysilicon resistor. A second layer of polysilicon is formed over the first layer of polysilicon and in the area for the thin polysilicon resistor. The thin polysilicon resistor is formed in the second layer of polysilicon and the sacrificial gate is formed in the first layer of polysilicon and the second layer of polysilicon. A PMD layer is formed over the second layer of polysilicon and a top portion of the PMD layer is removed so as to expose the sacrificial gate but not expose the second layer of polysilicon in the thin polysilicon resistor. The sacrificial gate is removed and a metal replacement gate is formed.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of priority under U.S.C. §119(e) ofU.S. Provisional Application 61/747,043 (Texas Instruments docket numberTI-71447PS) filed Dec. 28, 2012.

FIELD OF THE INVENTION

This invention relates to the field of integrated circuits. Moreparticularly, this invention relates to polysilicon resistors inintegrated circuits with metal gates

BACKGROUND OF THE INVENTION

Polysilicon resistors are an important component in integrated circuits.It may be desirable to control a doping density in the polysiliconresistor. In replacement gate metal integrated circuits typicallytransistors with polysilicon gates are first formed and covered with alayer of dielectric. The dielectric layer is then thinned until the topsof the polysilicon gates are exposed. The polysilicon gates are thenremoved and replaced with metal gates.

Typically when polysilicon resistors are required in these integratedcircuits, a thin layer of blocking dielectric is deposited after thedielectric layer is thinned and then patterned and etched to leavedielectric over the polysilicon resistors. The blocking dielectric layerprevents the polysilicon in the resistors from being removed when thepolysilicon gates are removed. One disadvantage with forming polysiliconresistors by this method is that the polysilicon resistor height isdetermined by the thinning process, which may vary from resistor toresistor, across a wafer and between wafers and between fabricationlots. Variation in the height of the polysilicon undesirably results invariation in resistance of the polysilicon resistors.

SUMMARY OF THE INVENTION

The following presents a simplified summary in order to provide a basicunderstanding of one or more aspects of the invention. This summary isnot an extensive overview of the invention, and is neither intended toidentify key or critical elements of the invention, nor to delineate thescope thereof. Rather, the primary purpose of the summary is to presentsome concepts of the invention in a simplified form as a prelude to amore detailed description that is presented later.

An integrated circuit containing a metal gate transistor and a thinpolysilicon resistor may be formed by forming a first layer ofpolysilicon over a substrate. The first layer of polysilicon issubsequently removed in an area for the thin polysilicon resistor and isleft in an area for a sacrificial gate of the metal gate transistor. Asecond layer of polysilicon is formed over the first layer ofpolysilicon and in the area for the thin polysilicon resistor. The thinpolysilicon resistor is formed in the second layer of polysilicon andthe sacrificial gate is formed in the first layer of polysilicon and thesecond layer of polysilicon. A pre-metal dielectric (PMD) layer isformed over the second layer of polysilicon and a top portion of the PMDlayer is removed so as to expose the sacrificial gate but not expose thesecond layer of polysilicon in the thin polysilicon resistor. Thesacrificial gate is removed and a metal replacement gate is formed. Thesecond layer of polysilicon provides a thin resistor body for the thinpolysilicon resistor.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A through FIG. 1N are cross sections of an exemplary integratedcircuit containing a thin polysilicon resistor and a metal gatetransistor, depicted in successive stages of fabrication.

Formation of an alternative exemplary integrated circuit is illustratedin FIG. 2A through FIG. 2E.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS

The present invention is described with reference to the attachedfigures. The figures are not drawn to scale and they are provided merelyto illustrate the invention. Several aspects of the invention aredescribed below with reference to example applications for illustration.It should be understood that numerous specific details, relationships,and methods are set forth to provide an understanding of the invention.One skilled in the relevant art, however, will readily recognize thatthe invention can be practiced without one or more of the specificdetails or with other methods. In other instances, well-known structuresor operations are not shown in detail to avoid obscuring the invention.The present invention is not limited by the illustrated ordering of actsor events, as some acts may occur in different orders and/orconcurrently with other acts or events. Furthermore, not all illustratedacts or events are required to implement a methodology in accordancewith the present invention.

An integrated circuit containing a metal gate transistor and a thinpolysilicon resistor may be formed by forming a first layer ofpolysilicon over a substrate. The first layer of polysilicon issubsequently removed in an area for the thin polysilicon resistor and isleft in an area for a sacrificial gate of the metal gate transistor. Asecond layer of polysilicon is formed over the first layer ofpolysilicon and in the area for the thin polysilicon resistor. The thinpolysilicon resistor is formed in the second layer of polysilicon andthe sacrificial gate is formed in the first layer of polysilicon and thesecond layer of polysilicon. A PMD layer is formed over the second layerof polysilicon and a top portion of the PMD layer is removed so as toexpose the sacrificial gate but not expose the second layer ofpolysilicon in the thin polysilicon resistor. The sacrificial gate isremoved and a metal replacement gate is formed. The second layer ofpolysilicon provides a thin resistor body for the thin polysiliconresistor.

FIG. 1A through FIG. 1N are cross sections of an exemplary integratedcircuit containing a thin polysilicon resistor and a metal gatetransistor, depicted in successive stages of fabrication. Referring toFIG. 1A, the integrated circuit 100 is formed in and on a substrate 102which includes semiconductor material 104. The integrated circuit 100includes an area for the metal gate transistor 106 and an area for thethin polysilicon resistor 108, and possibly an area for an optionalthick polysilicon resistor 110.

Field oxide 112 is formed at a top surface of the substrate 102 in thearea for the thin polysilicon resistor 108 and the area for the optionalthick polysilicon resistor 110. The field oxide 112 may include 250nanometers to 500 nanometers of silicon dioxide and possibly sublayersof silicon nitride or other dielectric material. The field oxide 112 maybe formed by a shallow trench isolation (STI) process or possibly by alocal oxidation of silicon (LOCOS) process.

A gate dielectric layer 114 is formed at the top surface of thesemiconductor material 104 in the area for the metal gate transistor106. The gate dielectric layer 114 may include silicon dioxide formed bythermal oxidation of the semiconductor material, and may further includehigh-k dielectric materials such as hafnium oxide, zirconium oxideand/or tantalum oxide.

A first layer of polysilicon 116 is formed over an existing top surfaceof the integrated circuit 100. The first layer of polysilicon 116 has athickness of, for example, 33 percent to 75 percent of a final gatethickness of the metal gate transistor 106, and so may be, per theexample, 15 nanometers to 50 nanometers thick. The first layer ofpolysilicon 116 may possibly be undoped or lightly doped below 1×10¹⁷cm⁻³, or alternatively may be doped above 1×10¹⁷ cm⁻³, for example byincluding dopant gases such as phosphine during formation of the firstlayer of polysilicon 116, or by subsequent ion implantation of dopantsafter the first layer of polysilicon 116 is formed. Ion implanteddopants may be implanted through an implant mask to restrict the dopantsto desired areas for components such as resistors of a particularconductivity and transistors of a particular polarity.

A resistor opening mask 118 is formed over the first layer ofpolysilicon 116 which exposes the area for the thin polysilicon resistor108, and covers the area for the metal gate transistor 106 and the areafor the thick polysilicon resistor 110. The resistor opening mask 118may include photoresist formed by a photolithographic process, or mayinclude hard mask material such as silicon nitride or amorphous carbon,formed by a mask and etch process.

Referring to FIG. 1B, the first layer of polysilicon 116 is removed inareas exposed by the resistor opening mask 118, including the area forthe thin polysilicon resistor 108, and is left in areas covered by theresistor opening mask 118, including the area for the metal gatetransistor 106 and the area for the thick polysilicon resistor 110. Thefirst layer of polysilicon 116 may be removed using a reactive ion etch(RIE) process which is selective to the field oxide 112. The resistoropening mask 118 is subsequently removed. Photoresist in the resistoropening mask 118 may be removed by ashing followed by a wet cleanprocess using an aqueous mixture of sulfuric acid and hydrogen peroxide.Amorphous carbon in a hard mask layer of the resistor opening mask 118may be removed by ashing. Silicon nitride in a hard mask layer of theresistor opening mask 118 may be removed using an RIE process that isselective to the first layer of polysilicon 116 and the field oxide 112.

Referring to FIG. 1C, a second layer of polysilicon 120 is formed overthe first layer of polysilicon 116 and over the field oxide 112 in thearea for the thin polysilicon resistor 108. The second layer ofpolysilicon 120 has a thickness of, for example, 50 percent to 75percent of a final gate thickness of the metal gate transistor 106, andso may be, per the example, 25 nanometers to 50 nanometers thick. Thesecond layer of polysilicon 120 may possibly be undoped or lightly dopedbelow 1×10¹⁷ cm⁻³, so as to provide a desired high sheet resistivity inthe thin polysilicon resistor 108. Alternatively, the second layer ofpolysilicon 120 may be doped p-type above 1×10¹⁸ cm⁻³, for example, toprovide a desired low temperature coefficient of resistance in the thinpolysilicon resistor 108, or may be doped n-type above 1×10¹⁸ cm⁻³, forexample, to provide a desired low sheet resistance in the thinpolysilicon resistor 108. The second layer of polysilicon 120 may bedoped p-type by including p-type dopant gas such as diborane duringformation of the second layer of polysilicon 120, or by subsequent ionimplantation of p-type dopants 122 such as boron through an implant mask126 which exposes the area for the thin polysilicon resistor 108.Analogously, the second layer of polysilicon 120 may be doped n-type byincluding n-type dopant gas such as phosphine during formation of thesecond layer of polysilicon 120, or by subsequent ion implantation ofn-type dopants 124 such as phosphorus through the implant mask 126. Theimplant mask 126 is subsequently removed.

Referring to FIG. 1D, an optional cap layer 128 may be formed over thesecond layer of polysilicon 120. The cap layer 128 may be 2 nanometersto 5 nanometers of dielectric material such as silicon dioxide and/orsilicon nitride. The cap layer 128 may advantageously prevent metalsilicide from forming on a gate of the metal gate transistor 106 duringa subsequent metal silicidation step. The cap layer 128 may alsocontribute to a hard mask functionality during a subsequent gate etchstep.

A gate etch mask 130 is formed over the second layer of polysilicon 120,and over the cap layer 128 if present. The gate etch mask 130 mayinclude several sublayers, for example a hard mask layer of siliconnitride on the cap layer 128, an amorphous carbon layer on the hard masklayer, an organic bottom anti-reflection coating (BARC) on the amorphouscarbon layer, and a photoresist layer on the BARC. Other configurationsof the gate etch mask 130 are within the scope of the instant example.The gate etch mask 130 covers the cap layer 128 if present or the secondlayer of polysilicon 120 if the cap layer 128 is not present in an areafor the gate of the metal gate transistor 106, and the area for the thinpolysilicon resistor 108 and the area for the thick polysilicon resistor110, and exposes the cap layer 128 or the second layer of polysilicon120 immediately outside these areas.

Referring to FIG. 1E, a gate etch process removes the cap layer 128, thesecond layer of polysilicon 120 and the first layer of polysilicon 116in areas exposed by the gate etch mask 130 to form a sacrificial gate132 of the metal gate transistor 106, a thin resistor body 134 of thethin polysilicon resistor 108, and a thick resistor body 136 of thethick polysilicon resistor 110. The gate etch process may include an RIEprocess which is selective to the field oxide 112 and the gatedielectric layer 114 using halogen radicals. The thin resistor body 134of the thin polysilicon resistor 108 includes the second layer ofpolysilicon 120 and is free of the first layer of polysilicon 116. Thethick resistor body 136 of the thick polysilicon resistor 110 includesthe second layer of polysilicon 120 and the first layer of polysilicon116.

A portion of the gate etch mask 130, for example the photoresist and theBARC, may be removed during the gate etch process. The remaining gateetch mask 130 is removed after the gate etch process is completed. Theamorphous carbon may be removed by ashing. The hard mask layer may beremoved by a plasma etch process that is selective to polysilicon.

Referring to FIG. 1F, offset spacers 138 may be formed on lateralsurfaces of the sacrificial gate 132, the thin resistor body 134 and thethick resistor body 136. At least a portion of the offset spacers 138may be formed, for example, by thermally oxidizing the lateral surfacesof the first layer of polysilicon 116 and the second layer ofpolysilicon 120. Another portion of the offset spacers 138 may beformed, for example, by forming a conformal layer of silicon dioxide,silicon nitride or other dielectric material over the sacrificial gate132, the thin resistor body 134 and the thick resistor body 136, andsubsequently using an anisotropic plasma etch process or an RIE processto remove the dielectric material from horizontal surfaces of theintegrated circuit 100, leaving the offset spacers 138.

Dopants 140 are ion implanted into the semiconductor material 104 of thesubstrate 102 adjacent to the sacrificial gate 132 to form source/drainextensions 142 of the metal gate transistor 106. The source/drainextensions 142 are sometimes referred to as lightly doped drain (LDD)regions or medium doped drain (MDD) regions. An implant mask 144 ofphotoresist is formed to block the dopants 140 from areas of theintegrated circuit 100 where not desired, for example from transistorsof opposite polarity than the metal gate transistor 106.

The dopants 140 may possibly be implanted into the thick resistor body136 and may be blocked from the thin resistor body 134 by the implantmask 144, as depicted in FIG. 1F. Alternatively, the dopants 140 maypossibly be implanted into the thin resistor body 134 and/or may beblocked from the thick resistor body 136.

The implant mask 144 is removed after the dopants 140 are implanted. Theimplant mask 144 may be removed by ashing followed by a wet clean stepusing an aqueous mixture of sulfuric acid and hydrogen peroxide.

Referring to FIG. 1G, source/drain spacers 146 formed adjacent tolateral surfaces of the sacrificial gate 132, the thin resistor body 134and the thick resistor body 136, on the offset spacers 138. Thesource/drain spacers 146 may be formed, for example, by formingconformal layers of silicon dioxide, silicon nitride and/or otherdielectric material over the sacrificial gate 132, the thin resistorbody 134 and the thick resistor body 136, and subsequently using ananisotropic plasma etch process or an RIE process to remove thedielectric material from horizontal surfaces of the integrated circuit100, leaving the source/drain spacers 146.

Dopants 148 are ion implanted into the semiconductor material 104 of thesubstrate 102 adjacent to the sacrificial gate 132 to form source/drainregions 150 of the metal gate transistor 106. A source/drain mask 152 ofphotoresist is formed to block the dopants 148 from areas of theintegrated circuit 100 where not desired, for example from transistorsof opposite polarity than the metal gate transistor 106.

The dopants 148 may possibly be implanted into heads 154 of the thinresistor body 134 and may be blocked from a body section 156 of the thinresistor body 134 and from the thick resistor body 136 by thesource/drain mask 152, as depicted in FIG. 1G. Alternatively, thedopants 140 may possibly be implanted into all of the thin resistor body134 or may be blocked from the thin resistor body 134 by thesource/drain mask 152, and similarly for the thick resistor body 136.

The source/drain mask 152 is removed after the dopants 148 areimplanted. The source/drain mask 152 may be removed by ashing followedby a wet clean step using an aqueous mixture of sulfuric acid andhydrogen peroxide.

Referring to FIG. 1H, an anneal step is performed which activates thedopants in the source/drain extensions 142 of FIG. 1G and thesource/drain regions 150 to form activated source/drain regions 150 ofthe metal gate transistor 106. Dopants implanted into the thin resistorbody 134 and the thick resistor body 136 may concurrently be activatedby the anneal step. The anneal step may include, for example, a laseranneal, a flash anneal and/or a spike anneal.

Metal silicide 158 may be formed at the top surface of the semiconductormaterial 104 in the source/drain regions 150, at a top surface of thesecond layer of polysilicon 120 in the heads 154 of the thin resistorbody 134, and at a top surface of the second layer of polysilicon 120 inheads of the thick resistor body 136. The metal silicide 158 may beformed by depositing a layer of metal, such as nickel, nickel andplatinum, cobalt or titanium, on a top surface of the integrated circuit100, heating the layer of metal to react a portion of the metal withexposed silicon, and selectively removing unreacted metal from theintegrated circuit 100 surface, commonly by exposing the unreacted metalto wet etchants including a mixture of an acid and hydrogen peroxide.The cap layer 128 on the sacrificial gate 132 prevents the metalsilicide 158 from forming on the second layer of polysilicon 120 in thesacrificial gate 132. The cap layer 128 may be patterned on the thinresistor body 134 and the thick resistor body 136 to expose areas forthe metal silicide 158, as depicted in FIG. 1H.

Referring to FIG. 1I, a PMD liner 160 may be formed over an existing topsurface of the integrated circuit 100. The PMD liner 160 may include 5nanometers to 20 nanometers of silicon nitride, possibly with acompressive stress greater than 100 megapascals. A PMD layer 162 isformed over the PMD liner 160 so as to cover the sacrificial gate 132 ofthe metal gate transistor 106, the thin resistor body 134 of the thinpolysilicon resistor 108 and the thick resistor body 136 of the thickpolysilicon resistor 110. The PMD layer 162 may include silicon dioxideformed by decomposition of tetraethyl orthosilicate, also known astetraethoxysilane or TEOS, and ozone, sometimes referred to as a highaspect ratio process (HARP).

Referring to FIG. 1J, a top portion of the PMD layer 162 is removed, forexample using a CMP process or a resist etchback process, so as toexpose the sacrificial gate 132 and the thick resistor body 136. The PMDliner 160 and the cap layer 128 are removed over the sacrificial gate132 and the thick resistor body 136. The thin resistor body 134 is notexposed and a portion of the PMD layer 162 remains over the thinresistor body 134. At least a portion of the metal silicide 158 on thethick resistor body 136 remains in place.

Referring to FIG. 1K, a blocking layer 164, for example of silicondioxide or silicon nitride, is formed over the thick resistor body 136to prevent removal of polysilicon during a subsequent gate removalprocess. The sacrificial gate 132 of the metal gate transistor 106 isnot covered by the blocking layer 164.

Referring to FIG. 1L, the second layer of polysilicon 120 and the firstlayer of polysilicon 116 in the sacrificial gate 132 of FIG. 1K areremoved. The removal process is performed without removing a significantportion of the PMD layer 162 or the blocking layer 164, so that thesecond layer of polysilicon 120 in the thin resistor body 134 and thesecond layer of polysilicon 120 and the first layer of polysilicon 116in the thick resistor body 136 are not damaged. The second layer ofpolysilicon 120 and the first layer of polysilicon 116 in thesacrificial gate 132 may be removed, for example, using an aqueoussolution of ammonium hydroxide or tetramethyl ammonium hydroxide (TMAH).The removal process may leave at least a portion of the gate dielectriclayer 114 in place, as depicted in FIG. 1L, or alternatively may removesubstantially all of the gate dielectric layer 114.

Referring to FIG. 1M, a metal replacement gate 166 is formed in themetal gate transistor 106. The metal replacement gate 166 may include,for example, one or more layers of titanium nitride, tantalum nitride,and/or aluminum. If the gate dielectric layer 114 was removed, areplacement gate dielectric layer, possibly including high-k materialssuch as hafnium oxide, zirconium oxide and/or tantalum oxide, may beformed in the metal gate transistor 106 prior to forming the metalreplacement gate 166. A thickness 168 of the thin resistor body 134 maybe, for example, 50 percent to 75 percent of a thickness 170 of the PMDlayer 162 adjacent to the thin polysilicon resistor 108. The thinresistor body 134 is thinner than the metal replacement gate 166.

Referring to FIG. 1N, an interlevel dielectric (ILD) layer 172 is formedover an existing top surface of the integrated circuit 100. The ILDlayer 172 may include boron-phosphorus-silicate glass (BPSG) or low-kdielectric material such as organo-silicate glass (OSG), and/orcarbon-doped silicon oxides (SiCO or CDO). The ILD layer 172 may includea cap layer of silicon nitride-based material and/or siliconcarbide-based material.

Contacts 174 are formed to make electrical connections to the metal gatetransistor 106, the thin polysilicon resistor 108 and the thickpolysilicon resistor 110. Instances of the contacts 174 are formedthrough the ILD layer 172, the PMD layer 162 and the PMD liner 160 tomake electrical connections to the metal silicide 158 on thesource/drain regions 150 of the metal gate transistor 106. Additionalinstances of the contacts 174 are formed through the ILD layer 172, thePMD layer 162 and the PMD liner 160 to make electrical connections tothe metal silicide 158 on the heads 154 of the thin polysilicon resistor108. Further instances of the contacts 174 are formed through the ILDlayer 172 and the blocking layer 164 to make electrical connections tothe metal silicide 158 on the heads 154 of the thick polysiliconresistor 110. The contacts 174 may be formed concurrently, or may beformed in separate groups. The contacts 174 may be formed in one piece,or may be formed in segments, for example with a lower segment throughthe PMD layer 162 and an upper segment through the ILD layer 172.

In the instant example, the PMD layer 162 covers the thin polysiliconresistor 108. A top surface of the second layer of polysilicon 120 inthe thin polysilicon resistor 108 is below a top surface of the metalreplacement gate 166 of the metal gate transistor 106 and below a topsurface of the second layer of polysilicon 120 in the thick polysiliconresistor 110. Forming the thin polysilicon resistor 108 of the secondlayer of polysilicon 120 as described in the instant exampleadvantageously reduces variation of a thickness of the thin resistorbody 134 because the effective thickness of the thin resistor body 134is primarily determined by a deposition thickness of the second layer ofpolysilicon 120. Variations due to deposition of the first layer ofpolysilicon 116 and the removal of the top portion of the PMD layer 162do not substantially affect the thickness of the thin resistor body 134.Reducing the variation of the thickness of the thin resistor body 134desirably reduces variation of an electrical resistance of the thinpolysilicon resistor 108. The process flow described in reference toFIG. 1A through FIG. 1N is intended to illustrate how the thinpolysilicon resistor 108 may be integrated into a replacement metal gateprocess flow. Details of how the thin polysilicon resistor 108 isintegrated into various metal replacement gate process flows may changedepending upon details of each process flow.

Formation of an alternative exemplary integrated circuit is illustratedin FIG. 2A through FIG. 2E. Instead of forming silicide after source anddrain formation as in described in reference to FIG. 1H, silicide may beformed after etching contact holes. Referring to FIG. 2A, the integratedcircuit 200 is formed in and on a substrate 202 which includessemiconductor material 204. The integrated circuit 200 includes an areafor the metal gate transistor 206 and an area for the thin polysiliconresistor 208, and possibly an area for an optional thick polysiliconresistor 210. Field oxide 212 is formed at a top surface of thesubstrate 202 in the area for the thin polysilicon resistor 208 and thearea for the optional thick polysilicon resistor 210.

The metal gate transistor 206 includes a gate dielectric layer 214 atthe top surface of the substrate 202 and a sacrificial gate 232 over thegate dielectric layer 214; the sacrificial gate includes a first layerof polysilicon 216 over the gate dielectric layer 214, and a secondlayer of polysilicon 220 over the first layer of polysilicon 216, andpossibly a cap layer 228 over the second layer of polysilicon 220.Activated source/drain regions 250 are formed in the semiconductormaterial 204 adjacent to the sacrificial gate 232.

The thin polysilicon resistor 208 includes a thin resistor body 234which includes the second layer of polysilicon 220 and the cap layer 228if present. The thin resistor body 234 is substantially free of thefirst layer of polysilicon 216, as described in reference to FIG. 1Athrough FIG. 1H. The thick polysilicon resistor 210 includes a thickresistor body 236 which includes the first layer of polysilicon 216, thesecond layer of polysilicon 220 and the cap layer 228.

Offset spacers 238 are formed on lateral surfaces of the sacrificialgate 232, the thin resistor body 234 and the thick resistor body 236.Source/drain spacers 246 formed adjacent to lateral surfaces of thesacrificial gate 232, the thin resistor body 234 and the thick resistorbody 236, on the offset spacers 238. A PMD liner 260 may be formed overthe metal gate transistor 206, the thin polysilicon resistor 208 thethick polysilicon resistor 210 as described in reference to FIG. 1I. APMD layer 262 is formed over the PMD liner 260 so as to cover the metalgate transistor 206, the thin polysilicon resistor 208 and the thickpolysilicon resistor 210.

Referring to FIG. 2B, the PMD layer 262 is thinned as described inreference to FIG. 1J. A blocking layer 264 is formed over the thickresistor body 236 as described in reference to FIG. 1K. The second layerof polysilicon 220 and the first layer of polysilicon 216 in thesacrificial gate 232 of FIG. 2A are removed, as described in referenceto FIG. 1L. A metal replacement gate 266 is formed in the metal gatetransistor 206 as described in reference to FIG. 1M. An ILD layer 272 isformed over an existing top surface of the integrated circuit 200 asdescribed in reference to FIG. 2N.

Contact holes 276 are formed through the ILD layer 272, the PMD layer262, the PMD liner 260, the blocking layer 264 and the cap layer 228 soas to expose the source/drain regions 250 of the metal gate transistor206, heads 254 of the thin resistor body 234, and the thick resistorbody 236. The contact holes 276 may be formed using an RIE process whichis selective to polysilicon and the source/drain regions 250.

Referring to FIG. 2C, a layer of refractory metal 278 is formed over theILD layer 272, extending into the contact holes 276 and making contactwith the source/drain regions 250 of the metal gate transistor 206,heads 254 of the thin resistor body 234, and the thick resistor body236. The layer of refractory metal 278 may include, for example, 5nanometers to 15 nanometers of nickel with 10 to 15 percent platinum and5 nanometers to 20 nanometers of titanium nitride formed by atomic layerdeposition (ALD) over the nickel platinum.

Referring to FIG. 2D, the layer of refractory metal 278 is heated toreact refractory metal with silicon to form metal silicide 258 at areasof contact between the layer of refractory metal 278 and thesource/drain regions 250 of the metal gate transistor 206, heads 254 ofthe thin resistor body 234, and the thick resistor body 236. Thetemperature and time required for formation of the metal silicide 258will depend on details of a pre-deposition cleanup in the contact holes,composition and thickness of the layer of refractory metal 278, andwidths of the contact holes 276, among other parameters. An exemplarysilicide formation process may include heating the layer of refractorymetal 278 described above to 300° C. for 30 seconds.

Following formation of the metal silicide 258, remaining refractorymetal in the layer of refractory metal 278 is removed. The remainingrefractory metal may be removed, for example, using a wet etch of anaqueous mixture of sulfuric acid and hydrogen peroxide.

Referring to FIG. 2E, contacts 274 are formed in the contact holes 276on the metal silicide 258. Forming the metal silicide 258 after formingthe contact holes 276 may advantageously simplify a fabrication sequenceand reduce fabrication cost for the integrated circuit 200 byeliminating the need to preserve the metal silicide during processing ofthe PMD layer 262.

While various embodiments of the present invention have been describedabove, it should be understood that they have been presented by way ofexample only and not limitation. Numerous changes to the disclosedembodiments can be made in accordance with the disclosure herein withoutdeparting from the spirit or scope of the invention. Thus, the breadthand scope of the present invention should not be limited by any of theabove described embodiments. Rather, the scope of the invention shouldbe defined in accordance with the following claims and theirequivalents.

What is claimed is:
 1. An integrated circuit, comprising: a metal gatetransistor having a metal gate; a pre-metal dielectric (PMD) layer overa substrate of said integrated circuit, such that said PMD layer doesnot extend over said metal gate; and a thin polysilicon resistordisposed above said substrate, said thin polysilicon resistor beingthinner said metal gate, such that said PMD layer extends over said thinpolysilicon resistor.
 2. The integrated circuit of claim 1, furthercomprising a thick polysilicon resistor disposed over said substrate,said thick polysilicon resistor being thicker than said thin polysiliconresistor, said thick polysilicon resistor including a first layer ofpolysilicon and a second layer of polysilicon over said first layer ofpolysilicon, such that said PMD layer does not extend over said thickpolysilicon resistor, said thin polysilicon resistor including saidsecond layer of polysilicon and being free of said first layer ofpolysilicon.
 3. The integrated circuit of claim 1, in which said layerof polysilicon of said thin polysilicon resistor is doped below 1×10¹⁷cm⁻³.
 4. The integrated circuit of claim 1, in which said layer ofpolysilicon of said thin polysilicon resistor is doped p-type above1×10¹⁸ cm⁻³.
 5. The integrated circuit of claim 1, in which said layerof polysilicon of said thin polysilicon resistor is doped n-type above1×10¹⁸ cm⁻³.
 6. The integrated circuit of claim 1, in which said layerof polysilicon of said thin polysilicon resistor is disposed over fieldoxide.
 7. The integrated circuit of claim 1, in which said layer ofpolysilicon of said thin polysilicon resistor has metal silicide atheads of said thin polysilicon resistor.
 8. The integrated circuit ofclaim 1, in which a thickness of a layer of polysilicon of said thinpolysilicon resistor is 50 percent to 75 percent of a thickness of saidPMD layer adjacent to said thin polysilicon resistor.
 9. A method offorming an integrated circuit, comprising the steps of: providing asubstrate; forming a first layer of polysilicon over said substrate;forming a resistor opening mask over said first layer of polysiliconwhich exposes an area for a thin polysilicon resistor and covers an areafor a metal gate transistor; removing said first layer of polysilicon inareas exposed by said resistor opening mask so that said first layer ofpolysilicon is removed in said area for said thin polysilicon resistorand is left in said area for said metal gate transistor; subsequentlyremoving said resistor opening mask; forming a second layer ofpolysilicon over said first layer of polysilicon and over said substratein said area for said thin polysilicon resistor; forming a gate etchmask over said second layer of polysilicon which covers an area for agate of said metal gate transistor and said area for said thinpolysilicon resistor; removing said second layer of polysilicon and saidfirst layer of polysilicon in areas exposed by said gate etch mask sothat said second layer of polysilicon is left in said area for said thinpolysilicon resistor to form a thin resistor body of said thinpolysilicon resistor and said second layer of polysilicon and said firstlayer of polysilicon are left in said area for said metal gatetransistor to form a sacrificial gate of said metal gate transistor;subsequently removing said gate etch mask; forming a PMD layer over saidsubstrate, said thin resistor body and said sacrificial gate; removing atop portion of said PMD layer so as to expose said sacrificial gate andso as to leave said thin resistor body covered by said PMD layer;removing said first layer of polysilicon and said second layer ofpolysilicon from said sacrificial gate so that said second layer ofpolysilicon in said thin resistor body is not damaged; forming a metalreplacement gate in said metal gate transistor, such that said thinpolysilicon resistor is thinner said metal replacement gate; and formingcontacts through said PMD layer to said second layer of polysilicon insaid thin resistor body.
 10. The method of claim 9, further comprisingthe steps: forming an implant mask over said second layer of polysiliconwhich exposes said area for said thin polysilicon resistor; implantingdopants into said second layer of polysilicon in areas exposed by saidimplant mask to provide dopants in said area for said thin polysiliconresistor above 1×10¹⁸ cm⁻³; and subsequently removing said implant mask.11. The method of claim 10, in which said dopants are p-type dopants.12. The method of claim 10, in which said dopants are n-type dopants.13. The method of claim 9, further comprising forming a cap layer ofdielectric material over said second layer of polysilicon prior to saidstep of forming said gate etch mask.
 14. The method of claim 9, inwhich: said resistor opening mask covers an area for a thick polysiliconresistor; said step of removing said first layer of polysilicon in areasexposed by said resistor opening mask leaves said first layer ofpolysilicon in said area for said thick polysilicon resistor; said gateetch mask covers said area for said thick polysilicon resistor; saidstep of removing said second layer of polysilicon and said first layerof polysilicon in areas exposed by said gate etch mask leaves saidsecond layer of polysilicon and said first layer of polysilicon in saidarea for said thick polysilicon resistor to form a thick resistor bodyof said thick polysilicon resistor; said step of removing said topportion of said PMD layer exposes said thick resistor body; said step ofremoving said first layer of polysilicon and said second layer ofpolysilicon from said sacrificial gate does not damage said second layerof polysilicon in said thick resistor body; and contacts to said secondlayer of polysilicon in said thick resistor body are formed concurrentlywith said contacts to said second layer of polysilicon in said thinresistor body.
 15. The method of claim 9, further comprising formingmetal silicide on heads of said thin resistor body prior to said step offorming said PMD layer.
 16. The method of claim 9, in which said step offorming said contacts through said PMD layer comprises the steps:forming contact holes through said PMD layer so as to expose said secondlayer of polysilicon in said thin resistor body; forming a layer ofrefractory metal which extends into said contact holes and makes contactwith heads of said thin resistor body; heating said layer of refractorymetal to form metal silicide at areas of contact between said layer ofrefractory metal and said heads of said thin resistor body; and formingsaid contacts in said via holes.
 17. The method of claim 9, furthercomprising ion implanting dopants concurrently into source/drain regionsof said metal gate transistor and into heads of said thin resistor body:18. The method of claim 9, further comprising forming field oxide at atop surface of said substrate prior to said step of forming said firstlayer of polysilicon, in which said area for said thin polysiliconresistor is located over said field oxide.
 19. The method of claim 9, inwhich said second layer of polysilicon of said thin polysilicon resistorhas thickness of 50 percent to 75 percent of a thickness of said PMDlayer adjacent to said thin polysilicon resistor after said step ofremoving said portion of said PMD layer.
 20. A method of forming anintegrated circuit, comprising the steps of: providing a substrate;field oxide at a top surface of said substrate; forming a first layer ofpolysilicon over said substrate; forming a resistor opening mask oversaid first layer of polysilicon which exposes an area for a thinpolysilicon resistor and covers an area for a metal gate transistor,said area for said thin polysilicon resistor being located over saidfield oxide; removing said first layer of polysilicon in areas exposedby said resistor opening mask so that said first layer of polysilicon isremoved in said area for said thin polysilicon resistor and is left insaid area for said metal gate transistor; subsequently removing saidresistor opening mask; forming a second layer of polysilicon over saidfirst layer of polysilicon and over said substrate in said area for saidthin polysilicon resistor; forming a cap layer of dielectric materialover said second layer of polysilicon; forming an implant mask over saidcap layer which exposes said area for said thin polysilicon resistor;implanting dopants into said second layer of polysilicon in areasexposed by said implant mask to provide dopants in said area for saidthin polysilicon resistor above 1×10¹⁸ cm⁻³; subsequently removing saidimplant mask forming a gate etch mask over said second layer ofpolysilicon which covers an area for a gate of said metal gatetransistor and said area for said thin polysilicon resistor; removingsaid second layer of polysilicon and said first layer of polysilicon inareas exposed by said gate etch mask so that said second layer ofpolysilicon is left in said area for said thin polysilicon resistor toform a thin resistor body of said thin polysilicon resistor and saidsecond layer of polysilicon and said first layer of polysilicon are leftin said area for said metal gate transistor to form a sacrificial gateof said metal gate transistor; subsequently removing said gate etchmask; forming a PMD layer over said substrate, said thin resistor bodyand said sacrificial gate; removing a top portion of said PMD layer soas to expose said sacrificial gate and so as to leave said thin resistorbody covered by said PMD layer, so that said second layer of polysiliconof said thin polysilicon resistor has thickness of 50 percent to 75percent of a thickness of said PMD layer adjacent to said thinpolysilicon resistor after removing said portion of said PMD layer;removing said first layer of polysilicon and said second layer ofpolysilicon from said sacrificial gate so that said second layer ofpolysilicon in said thin resistor body is not damaged; forming a metalreplacement gate in said metal gate transistor; and forming contactsthrough said PMD layer to said second layer of polysilicon in said thinresistor body.